Probe system Accessories
Positioners (manipulators) of all types
Positioners (manipulators) of all types are available to position the probe contact with high accuracy.
An optimal product can be selected based on X, Y and Z travel amount, adjustment sensitivity, size and other criteria. Custom manufacturing is also available.
The HP120 and HP130 Series also support high-frequency wave measurements up to 67 GHz.
Lineup
HP50 Compact positioner
Compact lead screw feed positioner.
The special guide mechanism allows for stable contact on 50μm or larger PAD.
| Model | HP50/R ( right hand model) HP50/L ( left hand model) |
|---|---|
| Travel range ( X,Y,Z ) | 5 / 5 / 5 mm |
| Screw resolution ( X,Y,Z ) | 0.5mm / rev. |
| Feature resolution | 10μm |
| Mounting | On/Off switching magnet base (standard) |
| Dimensions | W36×D85×H56 mm |
| Weight | approx. 200 grams |
| Correspondence Probe station |
– HMP-400/600 – HMP-800/1200 |
HP65 Compact high‐accuracy positioner
Compact micrometer feed type high-accuracy positioner.
Easily accesses 10μm or larger circuit pattern or PAD without backlash.
| Model | HP65 |
|---|---|
| Travel range ( X,Y,Z ) | 6.5 / 6.5 / 6.5 mm |
| Screw resolution ( X,Y,Z ) | 0.5mm / rev. |
| Feature resolution | 3μm |
| Mounting | On/Off switching magnet base (standard) |
| Dimensions | W38×D93×H68 mm |
| Weight | approx. 320 grams |
| Correspondence Probe station |
– HMP-400/600 – HMP-800/1200 |
HP80 Compact positioner
General‐purpose positioner designed for low cost. ( HP80/L・R‐M )
Stable contact on 70μm or larger PAD with minimal backlash.
| Model | HP80/R ( right hand model) HP80/L ( left hand model) |
|---|---|
| Travel range ( X,Y,Z ) | 12 / 8 / 12 mm |
| Screw resolution ( X,Y,Z ) | 0.635mm / rev. |
| Feature resolution | 15μm |
| Mounting | [ -M ] Rubber magnet base [ -E ] On/Off switching magnet base |
| Dimensions | [ -M ] W46×D74×H55 mm [ -E ] W41×D83×H69 mm |
| Weight | [ -M ] approx. 160 grams [ -E ] approx. 240 grams |
| Correspondence Probe station |
– HMP-400/600 – HMP-800/1200 |
HP120 High‐accuracy positioner
Precision lead screw feed high-accuracy positioner.
Stable contact on 10μm or larger circuit pattern or PAD without backlash.
| Model | HP120 |
|---|---|
| Travel range ( X,Y,Z ) | 12 / 12 / 12 mm |
| Screw resolution ( X,Y,Z ) | 0.254mm / rev. |
| Feature resolution | 2μm |
| Mounting | On/Off switching magnet base (standard) |
| Dimensions | W52×D107×H91 mm |
| Weight | approx. 690 grams |
| Correspondence Probe station |
– HMP-400/600 – HMP-800/1200 |
HP130A High‐accuracy positioner
Fine-pitch micrometer feed high-accuracy positioner.
Stable contact on internal devices of several micrometers and small PAD.
| Model | HP130A / R ( right hand model) HP130A / L ( left hand model) |
|---|---|
| Travel range ( X,Y,Z ) | 13 / 13 / 13 mm |
| Screw resolution ( X,Y,Z ) | 0.25mm / rev. |
| Feature resolution | 1μm |
| Mounting | [ -M ] On/Off switching magnet base [ -V ] Vacuum base |
| Dimensions | [ -M ] W71×D159×H124 mm [ -V ] W66×D159×H124 mm |
| Weight | [ -M ] approx. 1230 grams [ -V ] approx. 1190 grams |
| Correspondence Probe station |
– HMP-800/1200 |
HP130S Sub‐micron accuracy positioner
Steel ultra high-accuracy positioner.
Contact on submicron internal devices is possible with excellent rigidity and feed accuracy.
| Model | HP130S / R ( right hand model) HP130S / L ( left hand model) |
|---|---|
| Travel range ( X,Y,Z ) | 13 / 13 / 13 mm ( Standard ) 6.5 / 6.5 / 6.5 mm ( HR option ) |
| Screw resolution ( X,Y,Z ) | 0.25mm / rev. ( Standard ) 0.1 mm / rev. ( HR option ) |
| Feature resolution | ＜0.5μm |
| Mounting | [ -M ] On/Off switching magnet base [ -V ] Vacuum base |
| Dimensions | [ -M ] W71×D159×H124 mm [ -V ] W66×D159×H124 mm |
| Weight | [ -M ] approx. 3200 grams [ -V ] approx. 3160 grams |
| Correspondence Probe station |
– HMP-800/1200 |