Standard Manual Prober HMP-800(8inch) / HMP-1200(12inch)

Standard Manual Prober HMP-800(8inch) / HMP-1200(12inch)

Standard Manual Prober Model

Standard Manual Prober HMP-800 / 1200

This is a standard manual prober that supports 8 inch or 12 inch wafers.
This prober supports reliable on-wafer measurements with a simple yet high-accuracy mechanism that is easy to operate.
This standard manual prober model is scalable to support a wide range of applications such as hot chuck systems (from room temperature to +200°C or +300°C), submicron resolution stages, and laser cutters.

HiSOL, Inc. is a solution partner company of Keysight Technologies, Inc.

HiSOL, Inc. is a solution partner company of Keysight Technologies, Inc.

Model with built-in stereomicroscope

Model with built-in metallograph


  • Temperature characteristics tests in range from +20°C to +300°C
  • Ultra low signal I-V measurements (fA level)
  • Various C-V measurements (quasi-static C-V, HF-CV, and RF-CV)
  • RF measurements (up to 67 GHz)
  • Ultra high-speed I-V measurements

Extended applications

  • Probe card support (can support Multisite WLR)
  • Probing with submicron accuracy achieved by a built-in metallograph, active vibration isolator, and ultra high-accuracy stage
  • High-power device measurements (200A pulse, ±3kV triaxial, ±10kV coaxial)

System configuration examples

Model with built-in metallograph
Equipped with a hot chuck that supports a temperature range from +20°C to +300°C.

Model with built-in high performance stereomicroscope
Equipped with the probe card adapter.

Typical specifications

Item HMP-800 HMP‐1200
Wafer Size ~ φ200 mm ~ φ300 mm
X‐Y coarse travel X:205mm,Y:300mm X:305mm,Y:400mm
X‐Y fine travel XY:13mm/Micro meter head
θ travel coarse ±30°, fine ±2.5°
Platen Z axis action 0 / 0.3 / 10mm
0~13mm 0 to 15 mm
Unit dimension(W×D×H)* 550×650×450mm 690×780×450mm
Weight* 60kg 80kg

* Items with asterisk vary depending on system configuration.

Contact Us

Inquiry form

Use the following form to contact us. Be sure to fill in the required items.
NOTE: Currently we do not sell to the following countries. U.S.A, Canada, Australia

Privacy Policy

  • We comply with laws and regulations regarding personal information.
  • We strive to prevent unauthorized access to our customers’ personal information as well as the loss, damage, falsification, and exposure of such information.
  • Except for cases where personal information is disclosed based on laws and regulations, we use personal information within the scope of the purposes indicated to customers and do not transfer or provide such information to third parties.
  • We review our initiatives for protecting personal information on an ongoing basis to make improvements.