Compact Manual Prober HMP-400(4-inch)/HMP-600(6 inch)

Compact Manual Prober HMP-400(4-inch)/HMP-600(6 inch)

This probe system corresponds from on-chip measurement to measuring small diameter wafers up to4 inches or 6 inches. This manual prober is suitable for R&D.

  • I-V/C-V measurement in fAfemtoampere) level and fF(femtofarad) level.
  • Selectable tri-axial structured chuck enables ultra low current back gate measurement in fA level.
  • It can equip high temperature chuck ranging from RT to +300℃.
  • Repeatability of contact separation movement is within 2 μm
  • Planarity of chuck surface is 10 μm or less

NOTE: Currently we do not sell to the following countries. U.S.A, Canada, Australia

Mechanism

Platen Z Axis Guide

It equips ultra precision post bush, which enables steady probe contact with precise and smooth operation.

Microscope Mount

The microscope position can be moved with 3 joint horizontal swing arm.

Mechanism of Stage Movement



Two linear motion guides in the X axis and Y axis direction enables stable linier motion in the horizontal and vertical directions along the guide, which makes it possible to probe to regular patterns arranged on the wafer.

NOTE: Currently we do not sell to the following countries. U.S.A, Canada, Australia

Available Option

Compact high accuracy positinoer
From high performance model with submicron resolution to compact model with small footprint, we prepared various types according to the size of pads and wiring to be probed. Simple structure resin adapter is easy to install probe arm.

High performance probe
We have a wealth of lineups ranging from the standard model only for DC measurement to the Kelvin type compatible with ultra low signal measurement of fA level.
Dedicated cables is standard attached and you can select the terminating connector according to the measuring instrument.
Back gate measurement
We provide a chuck corresponding to the sample whose electrode is the back side. You can choose from two types, the standard Coaxial model and the Tri-axial model that enables ultra low signal measurement in fA level.
Temperature characteristic test
We offer hot chuck for high temperature test up to + 300 ℃. It is also compatible with back side measurement, and it is also possible to produce with Coaxial type and Tri-axial type. By adding an optional spot cooling unit, it is possible to speed up the temperature descending speed.
Screen display model
We offer hot chuck for high temperature test up to + 300 ℃. It is also compatible with back side measurement, and it is also possible to produce with Coaxial type and Tri-axial type. By adding an optional spot cooling unit, it is possible to speed up the temperature descending speed.
Shield box
We offer hot chuck for high temperature test up to + 300 ℃. It is also compatible with back side measurement, and it is also possible to produce with Coaxial type and Tri-axial type. By adding an optional spot cooling unit, it is possible to speed up the temperature descending speed.
Probe card adaptor
HMP – 400 corresponds to measurement with a probe card. An adapter mounting screw is attached on the platen, and we design and manufacture adapters conforming to the probe card you use.
Vibration-isolator
We provide high performance anti-vibration table that enables stable probing. From a simple rubber type or pneumatic spring type, to the active type which cancels the vibration by applying a force in the opposite direction to the incoming vibration, we prepare the optimum type according to the measurement environment.

NOTE: Currently we do not sell to the following countries. U.S.A, Canada, Australia

Ultra Low Current Measurement Ability

The following plot is a result of measuring the current value while impressing the sweep voltage from -200 to +200V to the probe and the chuck that are in open state. The result shows the noise and leak current of less than +/-10fA in all the ranges between -200V to 200V. It means that our probe system corresponds to ultra low signal measurement application that requires measurement precision of 100fA or less.


Model A74CJ
1tip-Kelvin Coaxial Probe

Model HCP40 Coaxial Probe

Model HTC40 Tri-axial Chuck
(Room Temperature)

Typical Specification

Item HMP-400 HMP-600
Wafer size Up to φ100mm Up to φ150mm
X-Y coarse travel X: 105mm, Y：150mm X: 155mm, Y： 200mm
X-Y fine travel XY: 13mm　/　Micro meter head
θ travel coarse±30°,fine ±2.5°
Platen Z axis action 0 – 20mm free
Platen Z axis adjustment 0 – 15mm
Unit dimension 350x390x450mm 390x450x450mm
Weight 28kg 36kg

NOTE: Currently we do not sell to the following countries. U.S.A, Canada, Australia

Contact Us

Inquiry form / Catalogue request

    Use the following form to contact us. Be sure to fill in the required items.
    NOTE: Currently we do not sell to the following countries. U.S.A, Canada, Australia


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